PI solves focusing problem with quick mechanisms and superior controllers.
Whether or not inspecting semiconductor wafers, measuring optical parts, or imaging organic samples, the standard of the info is dependent upon sustaining excellent focus. Fashionable microscopes and floor metrology techniques typically work at excessive magnifications the place the depth of focus will be only some micrometers –and even much less. A slight change in pattern top, floor topography, thermal drift, or vibration can shortly transfer the realm of curiosity out of focus, degrading picture high quality and measurement accuracy.
Choices – Piezo and Voice Coil
Quick nano-precision focusing techniques reminiscent of PI’s piezo-driven P-725 and voice-coil-driven V-308 resolve this problem by constantly adjusting the target lens or pattern place with nanometer-level decision and millisecond response occasions. In optical profilometry and 3D floor metrology, fast focus scanning permits correct reconstruction of advanced floor options, whereas in automated microscopy it permits giant areas or a number of samples to be inspected with out sacrificing picture sharpness.
Semiconductor Inspection / Metrology
The mix of excessive velocity and nanometer precision is very vital in semiconductor inspection, the place thousands and thousands of options have to be measured shortly and precisely. By minimizing focus errors and decreasing settling occasions, precision focusing techniques enhance throughput, enhance repeatability, and allow dependable detection of more and more smaller defects and constructions. As imaging resolutions proceed to enhance and manufacturing calls for enhance, quick nanopositioning focus techniques have grow to be a essential enabling know-how for next-generation metrology and microscopy gear.
Attaining nanometer precision in milliseconds, not solely requires precision mechanics and sensors, but additionally superior electronics and management algorithms. PI supplies benchtop and OEM digital movement controllers with superior linearization and optimization for each scanning and quick step & settle functions.
Industries Served and Functions
Semiconductor inspection, Metrology, DNA Sequencing, Microscopy, Photonics, Laser Processing.
Supply: